High Purity Carbon Tetrafluoride (CF₄ / R14) Gas

Carbon Tetrafluoride (CF₄ / R14) Gas | High Purity Specialty Gas

Supplier: Wenzhou Yingyue New Materials Co., Ltd.
CAS No.: 75-73-0 | UN No.: UN 1982 | HS Code: 2903399090
Hazard Class: Class 2.2 Non-flammable, Non-toxic Compressed Gas

Product Overview

Carbon Tetrafluoride (CF₄, also known as Tetrafluoromethane or refrigerant R14) is a colorless, odorless, non-flammable and chemically inert specialty gas with excellent thermal stability and dielectric properties. We supply CF₄ gas in industrial grade (99.99%) and ultra-high purity electronic grade (99.999%). Produced with advanced purification technology and strictly tested per GB/ISO/DOT international standards, our CF₄ features ultra-low impurity content, stable performance and consistent batch quality. It is widely used in semiconductor manufacturing, plasma etching and cleaning, low-temperature refrigeration and fluorine chemical synthesis.

Key Product Specifications

Purity Grade & Impurity Control

Physical and Chemical Properties

Carbon Tetrafluoride is a highly stable, inert fluorinated gas. It is chemically stable at room temperature, does not react with acids, bases, oxidants or reducing agents; only decomposes into toxic fluorine compounds at high temperatures above 1000℃. It is non-flammable, non-explosive under normal conditions, and has high dielectric strength.

Packaging & Transportation

We provide GB/ISO/DOT compliant dangerous goods packaging solutions. Standard 40L/47L steel cylinders with corrosion-resistant 316L stainless steel valves. All packages meet UN 1982 regulations; complete SDS safety data sheets, batch purity certificates and export qualification documents are provided for smooth customs clearance.

Main Applications

1. Semiconductor Manufacturing: Primary etching gas for silicon, silicon dioxide and silicon nitride in wafer processing.

2. Refrigeration Industry: Low-temperature refrigerant (R14) for cryogenic refrigeration systems.

3. Fluorine Chemical Synthesis: Key intermediate for the production of other fluorinated compounds.

4. Plasma Processing: Used in plasma surface treatment and thin film deposition processes.

Product Advantages

✅ High purity control, meeting strict electronic-grade requirements
✅ Stable chemical properties, ensuring consistent performance
✅ Global standard packaging, safe for long-distance transportation
✅ Comprehensive export support, complete dangerous goods documentation
✅ Customized solutions for different cylinder specifications and filling pressures

Safety & Export Compliance

All Carbon Tetrafluoride products comply with UN 1982 international dangerous goods regulations. We provide complete export documents including SDS, batch COA and qualification certificates.